| Interlayer fringe capacitance (downward direction) (aF/um) Poly Local interconnect Metal1 Metal2 Metal3 Metal4 | |
| Local interconnect 51.846 | |
| Metal1 46.724 59.496 | |
| Metal2 41.222 46.277 67.045 | |
| Metal3 43.531 46.708 54.814 69.846 | |
| Metal4 38.105 39.709 42.563 46.382 70.522 | |
| Metal5 39.908 41.147 43.188 45.592 54.152 82.819 |