.. list-table::
   :header-rows: 1
   :stub-columns: 1


   * - Parameter
     - NOM
     - LSL
     - USL
     - Units
     - Description

   * - RSN
     - 120
     - 108
     - 132
     - Ω/□
     - N+ diffusion sheet resistance

   * - RSNH
     - 114
     - 102
     - 126
     - Ω/□
     - HV N+ diffusion sheet resistance

   * - RSNW
     - 950
     - 550
     - 1350
     - Ω/□
     - N-Well sheet resistance

   * - RSP
     - 197
     - 166
     - 228
     - Ω/□
     - P+ diffusion sheet resistance

   * - RSPH
     - 191
     - 160
     - 228
     - Ω/□
     - HV P+ diffusion sheet resistance

   * - RSPW
     - 3050
     - 2565
     - 3535
     - Ω/□
     - P-Well sheet resistance

   * - RSDNW
     - 2200
     - 1825
     - 2575
     - Ω/□
     - Deep N-Well sheet resistance

   * - WN
     - 0.157
     - 0.088
     - 0.226
     - µm
     - Electrical N+ linewidth (drawn 0.14)

   * - WP
     - 0.144
     - 0.084
     - 0.204
     - µm
     - Electrical P+ linewidth (drawn 0.14)

   * - RSGPVDP
     - 48.2
     - 42.2
     - 55.8
     - Ω/□
     - poly sheet resistance, with NGNIT

   * - WGPUC15
     - 0.094
     - 0.053
     - 0.135
     - µm
     - Electrical poly linewidth (drawn 0.15)

   * - RSLI
     - 12.8
     - 9.2
     - 17.0
     - Ω/□
     - Local interconnect sheet resistance

   * - RSM1
     - 0.125
     - 0.105
     - 0.145
     - Ω/□
     - Metal-1 sheet resistance

   * - RSM2
     - 0.125
     - 0.105
     - 0.145
     - Ω/□
     - Metal-2 sheet resistance

   * - RSM3
     - 0.047
     - 0.038
     - 0.056
     - Ω/□
     - Metal-3 sheet resistance

   * - RSM4
     - 0.047
     - 0.038
     - 0.056
     - Ω/□
     - Metal-4 sheet resistance

   * - RSM5
     - 0.0285
     - 0.0212
     - 0.0358
     - Ω/□
     - Metal-5 sheet resistance