040000 tree d178daa8dc0bd2cf9cdb2fea0c276aaf039707f3	sky130_fd_sc_hd
040000 tree f2f1292c30b2b66b7d4b879429d947e71502290e	sky130_fd_sc_hdll
040000 tree 0eb187a0123b67534189b7bf68a78efcfd110b0b	sky130_fd_sc_hs
040000 tree 76cc0474e9564f77c0d8604bddfff2e518fcb3a5	sky130_fd_sc_ls
040000 tree 137ad3d28b4dfb42016233df2391f3c318096e6d	sky130_fd_sc_ms