| .. list-table:: | |
| :header-rows: 1 | |
| :stub-columns: 1 | |
| * - Parameter | |
| - NOM | |
| - LSL | |
| - USL | |
| - Units | |
| - Description | |
| * - CMIMA | |
| - 2 | |
| - 1.8 | |
| - 2.2 | |
| - fF/µm\ :sup:`2` | |
| - MiM cap area capacitance | |
| * - CMIMP | |
| - 0.19 | |
| - 0.11 | |
| - 0.27 | |
| - fF/µm | |
| - MiM cap periphery capacitance | |
| * - RSCAPM | |
| - 5.8 | |
| - 4.8 | |
| - 6.8 | |
| - Ω/□ | |
| - MiM top plate sheet resistance | |
| * - CMIM2A | |
| - 2 | |
| - 1.8 | |
| - 2.2 | |
| - fF/µm\ :sup:`2` | |
| - MiM2 cap area capacitance | |
| * - CMIM2P | |
| - 0.19 | |
| - 0.11 | |
| - 0.27 | |
| - fF/µm | |
| - MiM2 cap periphery capacitance | |
| * - RSCAPM | |
| - 5.8 | |
| - 4.8 | |
| - 6.8 | |
| - Ω/sq | |
| - MiM2 top plate sheet resistance | |