blob: 0596cd130a7696e8a0fd4d2c0dc7ace85ef9c134 [file] [log] [blame]
Layer,CD,nwell,,diff,,tap,,n/psdm,,poly,,npc,,licon,Manual,,
Parameter,width,spc,enc,spc,enc,spc,enc,spc,enc,spc,enc,spc,enc,spc,merge ?,,
nwell,0.840,1.270,X,X,X,X,X,X,X,X,X,X,X,X,Yes,,
diff,0.150,0.340,0.180,0.270,X,X,X,X,X,X,X,X,X,X,-,,
tap,0.150,0.130,0.180,0.270,-,0.270,X,X,X,X,X,X,X,X,-,,
n/psdm,0.380,-,-,0.130,0.130,0.130,0.130,0.380,X,X,X,X,X,X,Yes,,
poly on diff,0.150,-,-,-,-,0.300,-,-,-,0.210,X,X,X,X,-,,
poly on field,0.150,-,-,0.075,-,0.055,-,-,-,0.210,X,X,X,X,-,,
npc,0.270,-,-,-,-,-,-,-,-,0.090,X,0.270,X,X,Yes,,
licon,0.170,-,-,-,0.04/ 0.06,-,0.000,-,-,0.055,-,0.090,-,0.170,-,,
poly_licon,0.170,-,-,0.190,illegal,0.190,illegal,-,-,-,0.080,-,0.100,0.170,-,,