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Layer Resistivity (mohms/sq)
Poly 48200
Local interconnect 12800
Metal1 125
Metal2 125
Metal3 47
Metal4 47
Metal5 29
Deep nwell 2200000
Pwell (in deep nwell) 3050000
Nwell 1700000
N-diffusion 120000
P-diffusion 197000
HV N-diffusion 114000
HV P-diffusion 191000
XHR poly resistor 319800
UHR poly resistor 2000000
LICON contact 15000
MCON contact 152000
VIA 4500
VIA2 3410
VIA3 3410
VIA4 380