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Criteria & Assumptions
======================
Process Stack Diagram
---------------------
.. image:: ../_static/metal_stack.svg
:width: 100%
:alt: SkyWater SKY130 Process Stack
Details about the layers can be found in :ref:`SkyWater GDS Layers Information` page.
General
-------
.. csv-table:: Table 1 - General
:file: assumptions/01-general.csv
:header-rows: 1
:stub-columns: 1
Minimum Critical Dimensions
---------------------------
.. csv-table:: Table 2 - Minimum CDs in Design or on Wafer, required by Technology (Core or Periphery)
:file: assumptions/02-mins.csv
:header-rows: 1
:widths: 20, 20, 10, 10, 10, 10
Semiconductor Criteria
----------------------
Basic Parameters
~~~~~~~~~~~~~~~~
.. csv-table:: Table 3a - Semiconductor Criteria - Basic Parameters
:header-rows: 1
:width: 100%
:widths: 30, 10, 20, 10
,Units,Value,Variable name
n-well peak concentration,cm-3,6.00E+017,NWPCONC
background concentration,cm-3,8.00E+14,NWBCONC
y.char,um,0.43,NWYCHAR
desired Nmin/Ns ratio,,0.9,NMINNSRATIO
min n-well width to guarantee 90 % peak concentr.,um,0.55,MINNWWID
p-well peak concentration,cm-3,4E+017,PWPCONC
p-well peak coordinate,um,0.42,PWPCOORD
y.char,um,0.13,PWYCHAR
min. p-well width to guarantee 90 % peak concentr.,um,0.33,MINPWWID
Junction Depths
~~~~~~~~~~~~~~~
.. csv-table:: Table 3b - Semiconductor Criteria - Junction Depths
:header-rows: 1
:width: 100%
:widths: 30, 10, 10, 10, 10
,Units,Vertical Feature,Vertical Space,Variable name
Baseline: N-Well,um,1.1, ,NWVDIM
P-Well,um,0.75,,PWVDIM
N-w/P-w junction (from drawn edge),um,*,0.034,WELLJCT
N+ or P+ S/D (XJ),um,0.1,0.06,JCTD / LD
Max (N+ or P+ S/D outdiff.) next to isol. edge,um,,0.007,LDST
Max (N+ or P+ S/D outdiff.) next to isol. edge for 6 V reg. devices,,,0.05,LDST5
N Tip (As),um, ,0.01,LDNTIP
Other Width Criteria
~~~~~~~~~~~~~~~~~~~~
.. csv-table:: Table 3c - Semiconductor Criteria - Other Width Criteria
:header-rows: 1
:width: 100%
:widths: 30, 10, 20, 10
,Units,Value,Variable name
Min. diff/tap width for reproducible resistivity,um,0.12,MINFWR
Min. width to open a strip of tap between two diffs,um,0.34,SDM3
"Max s/d diff width without contact, consistent w/Ram4,5,6",um,5.7,XMAXCON
Punchthrough Criteria
~~~~~~~~~~~~~~~~~~~~~
.. csv-table:: Table 3d - Semiconductor Criteria - Minimum Spacing for 3.3V Punchthrough (1.8V devices)
:header-rows: 1
:width: 100%
:widths: 30, 10, 20, 10
,Units,Value,Variable name
n-well - n-well ,um,0.835,NWPTS
n+ - n+ or p+-p+,um,0.23,DPTS
p+ in nwell to pwell,um,0.05,PPTS
n+ in pwell to nwell,um,0.15,PNPTS
Latch-up/ESD Criteria
~~~~~~~~~~~~~~~~~~~~~
.. csv-table:: Table 3e - Semiconductor Criteria - Latch-up/ESD Criteria
:header-rows: 1
:width: 100%
:widths: 30, 10, 20, 10
Minimum n+ or p+ - nwell spacing to prevent latch-up,um,0.23,NPNWLU
Min n-well enclos. of tap to ensure bkdwn N-w/P-w before N+/P-w (ESD),um,0.04,XNWESD
Max. overlap of n-well by p+ tap,um,0.06,XNWPTS
Implant angles
~~~~~~~~~~~~~~
.. csv-table:: Table 3f - Semiconductor Criteria - Implant angles
:header-rows: 1
:width: 100%
:widths: 30, 10, 10, 10, 10
,Units,Angle,,Variable name
High current,deg,0,0,HCIMPA
Angle for tip implant ,deg,7,,TipAng
Angle for HV tip implant ,deg,40,,HvTipAngle
Twist angle for HV Tip ,deg,23,,HvTipTwist
Physical Criteria
-----------------
.. csv-table:: Table 4 - Physical Criteria
:file: assumptions/04-physical.csv
:header-rows: 1
:widths: 60, 10, 1, 10, 10, 10
Laser Fuse Criteria
-------------------
.. csv-table:: Table 5 - Laser Fuse Criteria
:file: assumptions/05-laser-fuse.csv
:header-rows: 1
:widths: 60, 10, 1, 10, 10, 10
.. What happened to 6!?
Other criteria and parameters
-----------------------------
.. csv-table:: Table 7 - Other criteria and parameters
:file: assumptions/07-other.csv
:header-rows: 1
:widths: 60, 10, 1, 10, 10, 10
Criteria for High Voltage FET
-----------------------------
.. csv-table:: Table 8 - Criteria for High Voltage FET
:file: assumptions/08-hv.csv
:header-rows: 1
:widths: 60, 10, 1, 10, 10, 10
Criteria for polyimide manufacturability
----------------------------------------
.. csv-table:: Table 9 - Criteria for polyimide manufacturability
:file: assumptions/09-polyimide.csv
:header-rows: 1
:widths: 60, 10, 1, 10, 10, 10
Criteria for VPP capacitor
--------------------------
.. csv-table:: Table 10 - Criteria for VPP capacitor
:file: assumptions/10-vpp-capacitor.csv
:header-rows: 1
:widths: 60, 10, 1, 10, 10, 10