Layer Resistivity (mohms/sq) | |
Poly 48200 | |
Local interconnect 12800 | |
Metal1 125 | |
Metal2 125 | |
Metal3 47 | |
Metal4 47 | |
Metal5 29 | |
Deep nwell 2200000 | |
Pwell (in deep nwell) 3050000 | |
Nwell 1700000 | |
N-diffusion 120000 | |
P-diffusion 197000 | |
HV N-diffusion 114000 | |
HV P-diffusion 191000 | |
XHR poly resistor 319800 | |
UHR poly resistor 2000000 | |
LICON contact 15000 | |
MCON contact 152000 | |
VIA 4500 | |
VIA2 3410 | |
VIA3 3410 | |
VIA4 380 |