| Interlayer parallel plate capacitance (aF/um^2) Local interconnect Metal1 Metal2 Metal3 Metal4 Metal5 | |
| Poly 94.1644 44.8056 24.4968 16.0552 10.0131 7.2085 | |
| Local interconnect 114.1970 37.5647 20.7915 11.6705 8.0265 | |
| Metal1 133.8610 34.5350 15.0275 9.4789 | |
| Metal2 86.1861 20.3321 11.3410 | |
| Metal3 84.0346 19.6269 | |
| Metal4 68.3252 |