040000 tree a913c3589f2abe8fb7ffffdd1352996cf8e349b7	sky130_fd_sc_hd
040000 tree 129c3825f11ac5e06eaa203ac16537e918962d68	sky130_fd_sc_hdll
040000 tree 27df4af4ef5f6fd9eec28ee91b00ed33b9540ced	sky130_fd_sc_hs
040000 tree 861866089c7a264a066ba98ebb9dc690a20ae35e	sky130_fd_sc_ls
040000 tree a85b0294f6abd32524298e052d642f90b974225c	sky130_fd_sc_ms