040000 tree 2badc3e60ce461c5c4ff70db205a2bfb67384b98	sky130_fd_sc_hd
040000 tree bfb81b9c8d95d1d45dc5e766f82e8391a79feb85	sky130_fd_sc_hdll
040000 tree 01d92d18333aeb4bd9e405882f68726a4bc38733	sky130_fd_sc_hs
040000 tree c92944fa1290c922a9bf167d634407ca3a68e628	sky130_fd_sc_ls
040000 tree 86103f8278ef5cb7802f1d88b860648cdf8e4ee3	sky130_fd_sc_ms