040000 tree 195afba1afc4c62f2c9e5d50bcbd330e4b8ba657	sky130_fd_sc_hd
040000 tree 7e8d902fa04e3442081fffe5561387bf8a9405fc	sky130_fd_sc_hdll
040000 tree 0c303fc88999a02a9cdada86630c0ab7a3cd307e	sky130_fd_sc_hs
040000 tree 24c5eda4b0ceb6751bf461a185196f165f88a492	sky130_fd_sc_ls
040000 tree 08bcf738bda51b1299577d11f4039adc82a8703e	sky130_fd_sc_ms