040000 tree 4620a0730c0e7e95dbbebc15cbf1f76d6f20f242	sky130_fd_sc_hd
040000 tree 9d9d593f569cb1835e560fb2097b5e71f6277f9d	sky130_fd_sc_hdll
040000 tree a36228ad87b5ae8e30a40f1ca9893ef25a8a6f7e	sky130_fd_sc_hs
040000 tree 6684d6a0b3dfeaff7de5f9be370c8adbece97556	sky130_fd_sc_ls
040000 tree e79ce54928e4161ecdfd2b11669ef47155b1c323	sky130_fd_sc_ms