| Name,Description,Flags,Value | |
| (m2.-),"Algorithm should flag errors, for met2, if ANY of the following is true:\nAn entire 700x700 window is covered by cmm2 waffleDrop, and metX PD < 70% for same window.\n80-100% of 700x700 window is covered by cmm2 waffleDrop, and metX PD < 65% for same window.\n60-80% of 700x700 window is covered by cmm2 waffleDrop, and metX PD < 60% for same window.\n50-60% of 700x700 window is covered by cmm2 waffleDrop, and metX PD < 50% for same window.\n40-50% of 700x700 window is covered by cmm2 waffleDrop, and metX PD < 40% for same window.\n30-40% of 700x700 window is covered by cmm2 waffleDrop, and metX PD < 30% for same window.\nExclude cells whose area is below 40Kum2. Required for IP, Recommended for Chip-level.",RC, | |
| (m2.1),Width of metal 2,,0.140 | |
| (m2.2),Spacing of metal 2 to metal 2,,0.140 | |
| (m2.3a),Min. spacing of features attached to or extending from huge_met2 for a distance of up to 0.280 um to metal2 (rule not checked over non-huge met2 features),,0.280 | |
| (m2.3b),Min. spacing of huge_met2 to metal2 excluding features checked by m2.3a,,0.280 | |
| (m2.3c),"Min spacing between floating_met2 with AR_met2_A >= 0.05 and AR_met2_B =< 0.032, outside areaid:sc must be greater than",RR,0.145 | |
| (m2.4),Via must be enclosed by Met2 by at least …,P AL,0.055 | |
| (m2.5),Via must be enclosed by Met2 on one of two adjacent sides by at least …,AL,0.085 | |
| (m2.6),Min metal2 area [um2],,0.0676 | |
| (m2.7),Min area of metal2 holes [um2],,0.140 | |
| (m2.pd.1),Min MM2_oxide_Pattern_density,RR,0.7 | |
| (m2.pd.2a),Rule m2.pd.1 has to be checked by dividing the chip into square regions of width and length equal to …,A,700 | |
| (m2.pd.2b),Rule m2.pd.1 has to be checked by dividing the chip into steps of …,A,70 | |
| (m2.11),Max width of metal2,CU,4.000 | |
| (m2.12),Add slots and remove vias and contacts if met2 wider than…..,CU,3.200 | |
| (m2.13),Max pattern density (PD) of metal2,CU,0.77 | |
| (m2.14),Met2 PD window size,CU,50.000 | |
| (m2.14a),Met2 PD window step,CU,25.000 | |
| (m2.15),Via must be enclosed by met2 by at least…,CU,0.040 |