Layer,CD,licon,,li1,,mcon,,metal1,,via,,metal2,,via2,,metal3,
Parameter,width,spc,enc,spc,enc,spc,enc,spc,enc,spc,enc,spc,enc,spc,enc,spc,enc
li1,0.170,undefined,0.000,0.170,X,X,X,X,X,X,X,X,X,X,X,X,X
mcon,0.170,-,-,-,0.000,0.190,X,X,X,X,X,X,X,X,X,X,X
metal1,0.140,-,-,-,-,-,0.03/ 0.06,0.140,X,X,X,X,X,X,X,X,X
via,0.150,-,-,-,-,-,-,-,0.055 / 0.085,0.170,X,X,X,X,X,X,X
metal2,0.140,-,-,-,-,-,-,-,-,-,0.055,0.140,X,X,X,X,X
via2,0.280,-,-,-,-,-,-,-,-,-,-,-,0.190,1.200,X,X,X
metal3,2.500,-,-,-,-,-,-,-,-,-,-,-,-,-,0.310,2.500,X
,All enclosures in tables are nominal and do not apply to butting edges or corners.,,,,,,,,,,,,,,,,