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# Copyright 2022 GlobalFoundries PDK Authors
#
# Licensed under the Apache License, Version 2.0 (the "License");
# you may not use this file except in compliance with the License.
# You may obtain a copy of the License at
#
# http://www.apache.org/licenses/LICENSE-2.0
#
# Unless required by applicable law or agreed to in writing, software
# distributed under the License is distributed on an "AS IS" BASIS,
# WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied.
# See the License for the specific language governing permissions and
# limitations under the License.
##################################################################################
#
# GLOBALFOUNDRIES
#
##################################################################################
#
# 180MCU Tech LEF File
# based on DRM DM-000013-01 Rev 13
# TFG-Version: 2.1.9
# Date: February 2018
#-------------------------------------------------------
# metal stack option: 3LM_1TM_30K
# Preferred routing directions:
# vertical: Metal2
# horizontal: Metal1 Metal3
#------------------------------------------------------
# This Techfile contains not correct Parasitic Information.
# USE Appropriate parasitic files for Parasitic Extraction.
#------------------------------------------------------
VERSION 5.7 ;
BUSBITCHARS "[]" ;
DIVIDERCHAR "/" ;
UNITS
DATABASE MICRONS 2000 ;
CAPACITANCE PICOFARADS 1 ;
CURRENT MILLIAMPS 1 ;
RESISTANCE OHMS 1 ;
END UNITS
PROPERTYDEFINITIONS
LAYER LEF58_EOLENCLOSURE STRING ;
LAYER LEF58_TYPE STRING ;
END PROPERTYDEFINITIONS
MANUFACTURINGGRID 0.0050 ;
CLEARANCEMEASURE EUCLIDEAN ;
USEMINSPACING OBS ON ;
LAYER Poly2
TYPE MASTERSLICE ;
END Poly2
LAYER CON
TYPE CUT ;
END CON
LAYER Metal1
TYPE ROUTING ;
DIRECTION HORIZONTAL ;
PITCH 0.56 ;
OFFSET 0.0 ;
MINWIDTH 0.230 ; # Mn.1 (n=1)
WIDTH 0.230 ; # Mn.1 (n=1)
SPACING 0.230 ; # Mn.2a (n=1)
SPACING 0.300 RANGE 10.005 999.00 ; # Mn.2b
AREA 0.1444 ; # Mn.3
THICKNESS 0.54 ;
ANTENNAMODEL OXIDE1 ;
ANTENNASIDEAREARATIO 400 ;
DCCURRENTDENSITY AVERAGE 0.67 ;
ACCURRENTDENSITY AVERAGE 1.00 ;
CAPACITANCE CPERSQDIST 0.0000394 ;
RESISTANCE RPERSQ 0.090000 ;
MINIMUMDENSITY 30.0 ;
DENSITYCHECKWINDOW 200.0 200.0 ;
DENSITYCHECKSTEP 100.0 ;
END Metal1
LAYER Via1
TYPE CUT ;
SPACING 0.26 ;
WIDTH 0.26 ;
ENCLOSURE BELOW 0.00 0.06 ;
ENCLOSURE ABOVE 0.01 0.06 ;
PROPERTY LEF58_EOLENCLOSURE "
EOLENCLOSURE 0.34 0.06 ;" ;
ARRAYSPACING CUTSPACING 0.36 ARRAYCUTS 4 SPACING 0.36 ; # Vn.2b
ACCURRENTDENSITY AVERAGE 0.28 ;
DCCURRENTDENSITY AVERAGE 0.18 ;
ANTENNAMODEL OXIDE1 ;
ANTENNAAREARATIO 20.0 ;
END Via1
LAYER Metal2
TYPE ROUTING ;
DIRECTION VERTICAL ;
PITCH 0.56 ;
OFFSET 0.0 ;
MINWIDTH 0.280 ;
WIDTH 0.280 ; # Mn.1 (n>1)
SPACING 0.280 ; # Mn.2a (n>1)
SPACING 0.300 RANGE 10.005 999.00 ; # Mn.2b
AREA 0.1444 ; # Mn.3
THICKNESS 0.54 ;
ANTENNAMODEL OXIDE1 ;
ANTENNADIFFSIDEAREARATIO 400 ;
ANTENNAGATEPLUSDIFF 2 ;
DCCURRENTDENSITY AVERAGE 0.67 ;
ACCURRENTDENSITY AVERAGE 1.00 ;
CAPACITANCE CPERSQDIST 0.0000394 ;
RESISTANCE RPERSQ 0.090000 ;
MINIMUMDENSITY 30.0 ;
DENSITYCHECKWINDOW 200.0 200.0 ;
DENSITYCHECKSTEP 100.0 ;
END Metal2
LAYER Via2
TYPE CUT ;
SPACING 0.26 ;
WIDTH 0.26 ;
ENCLOSURE BELOW 0.01 0.06 ;
ENCLOSURE ABOVE 0.12 0.25 ;
ENCLOSURE ABOVE 0.12 0.12 WIDTH 2.5 ;
PROPERTY LEF58_EOLENCLOSURE "
EOLENCLOSURE 2.5 ABOVE 0.250 ;" ;
ARRAYSPACING CUTSPACING 0.36 ARRAYCUTS 4 SPACING 0.36 ; # Vn.2b
ACCURRENTDENSITY AVERAGE 0.28 ;
DCCURRENTDENSITY AVERAGE 0.18 ;
ANTENNAMODEL OXIDE1 ;
ANTENNAAREARATIO 20.0 ;
END Via2
LAYER Metal3
TYPE ROUTING ;
DIRECTION HORIZONTAL ;
OFFSET 0.0 ;
PITCH 4.000 ;
MINWIDTH 2.200 ; # MT30.1
WIDTH 2.200 ; # MT30.1
SPACING 1.800 ; # MT30.2, MT30.3
MINIMUMCUT 4 WIDTH 1.790 FROMBELOW ; # MT30.8b
DCCURRENTDENSITY AVERAGE 5.37 ;
ACCURRENTDENSITY AVERAGE 8.06 ;
RESISTANCE RPERSQ 0.01000 ;
THICKNESS 3.035 ;
ANTENNAMODEL OXIDE1 ;
ANTENNADIFFSIDEAREARATIO 400 ;
ANTENNAGATEPLUSDIFF 2 ;
CAPACITANCE CPERSQDIST 0.0000394 ;
MINIMUMDENSITY 30.0 ;
DENSITYCHECKWINDOW 200.0 200.0 ;
DENSITYCHECKSTEP 100.0 ;
END Metal3
LAYER OVERLAP
TYPE OVERLAP ;
END OVERLAP
LAYER PR_bndry
TYPE MASTERSLICE ;
END PR_bndry
#------------------------------------------------------------
# Via1 VIA SECTION
#------------------------------------------------------------
VIA Via1_HH DEFAULT
LAYER Via1 ;
RECT -0.130 -0.130 0.130 0.130 ;
LAYER Metal1 ;
RECT -0.190 -0.130 0.190 0.130 ;
LAYER Metal2 ;
RECT -0.190 -0.140 0.190 0.140 ;
RESISTANCE 4.500 ;
END Via1_HH
VIA Via1_HV DEFAULT
LAYER Via1 ;
RECT -0.130 -0.130 0.130 0.130 ;
LAYER Metal1 ;
RECT -0.190 -0.130 0.190 0.130 ;
LAYER Metal2 ;
RECT -0.140 -0.190 0.140 0.190 ;
RESISTANCE 4.500 ;
END Via1_HV
VIA Via1_VH DEFAULT
LAYER Via1 ;
RECT -0.130 -0.130 0.130 0.130 ;
LAYER Metal1 ;
RECT -0.130 -0.190 0.130 0.190 ;
LAYER Metal2 ;
RECT -0.190 -0.140 0.190 0.140 ;
RESISTANCE 4.500 ;
END Via1_VH
VIA Via1_VV DEFAULT
LAYER Via1 ;
RECT -0.130 -0.130 0.130 0.130 ;
LAYER Metal1 ;
RECT -0.130 -0.190 0.130 0.190 ;
LAYER Metal2 ;
RECT -0.140 -0.190 0.140 0.190 ;
RESISTANCE 4.500 ;
END Via1_VV
VIA Via1_2CUT_H
LAYER Via1 ;
RECT -0.390 -0.130 -0.130 0.130 ;
RECT 0.130 -0.130 0.390 0.130 ;
LAYER Metal1 ;
RECT -0.450 -0.130 0.450 0.130 ;
LAYER Metal2 ;
RECT -0.400 -0.190 0.400 0.190 ;
END Via1_2CUT_H
VIA Via1_2CUT_V
LAYER Via1 ;
RECT -0.130 -0.390 0.130 -0.130 ;
RECT -0.130 0.130 0.130 0.390 ;
LAYER Metal1 ;
RECT -0.190 -0.390 0.190 0.390 ;
LAYER Metal2 ;
RECT -0.140 -0.450 0.140 0.450 ;
END Via1_2CUT_V
VIA Via1_2X2_0_60_10_60_H_H DEFAULT
LAYER Via1 ;
RECT -0.390 -0.390 -0.130 -0.130 ;
RECT 0.130 -0.390 0.390 -0.130 ;
RECT -0.390 0.130 -0.130 0.390 ;
RECT 0.130 0.130 0.390 0.390 ;
LAYER Metal1 ;
RECT -0.450 -0.390 0.450 0.390 ;
LAYER Metal2 ;
RECT -0.450 -0.400 0.450 0.400 ;
END Via1_2X2_0_60_10_60_H_H
VIA Via1_2X2_0_60_10_60_H_V DEFAULT
LAYER Via1 ;
RECT -0.390 -0.390 -0.130 -0.130 ;
RECT 0.130 -0.390 0.390 -0.130 ;
RECT -0.390 0.130 -0.130 0.390 ;
RECT 0.130 0.130 0.390 0.390 ;
LAYER Metal1 ;
RECT -0.450 -0.390 0.450 0.390 ;
LAYER Metal2 ;
RECT -0.400 -0.450 0.400 0.450 ;
END Via1_2X2_0_60_10_60_H_V
VIA Via1_2X2_0_60_10_60_V_H DEFAULT
LAYER Via1 ;
RECT -0.390 -0.390 -0.130 -0.130 ;
RECT 0.130 -0.390 0.390 -0.130 ;
RECT -0.390 0.130 -0.130 0.390 ;
RECT 0.130 0.130 0.390 0.390 ;
LAYER Metal1 ;
RECT -0.390 -0.450 0.390 0.450 ;
LAYER Metal2 ;
RECT -0.450 -0.400 0.450 0.400 ;
END Via1_2X2_0_60_10_60_V_H
VIA Via1_2X2_0_60_10_60_V_V DEFAULT
LAYER Via1 ;
RECT -0.390 -0.390 -0.130 -0.130 ;
RECT 0.130 -0.390 0.390 -0.130 ;
RECT -0.390 0.130 -0.130 0.390 ;
RECT 0.130 0.130 0.390 0.390 ;
LAYER Metal1 ;
RECT -0.390 -0.450 0.390 0.450 ;
LAYER Metal2 ;
RECT -0.400 -0.450 0.400 0.450 ;
END Via1_2X2_0_60_10_60_V_V
VIARULE Via1_GEN_HH GENERATE
LAYER Metal1 ;
ENCLOSURE 0.060 0.000 ;
LAYER Metal2 ;
ENCLOSURE 0.060 0.010 ;
LAYER Via1 ;
RECT -0.130 -0.130 0.130 0.130 ;
SPACING 0.520 BY 0.520 ;
END Via1_GEN_HH
VIARULE Via1_GEN_HV GENERATE
LAYER Metal1 ;
ENCLOSURE 0.060 0.000 ;
LAYER Metal2 ;
ENCLOSURE 0.010 0.060 ;
LAYER Via1 ;
RECT -0.130 -0.130 0.130 0.130 ;
SPACING 0.520 BY 0.520 ;
END Via1_GEN_HV
VIARULE Via1_GEN_VH GENERATE
LAYER Metal1 ;
ENCLOSURE 0.000 0.060 ;
LAYER Metal2 ;
ENCLOSURE 0.060 0.010 ;
LAYER Via1 ;
RECT -0.130 -0.130 0.130 0.130 ;
SPACING 0.520 BY 0.520 ;
END Via1_GEN_VH
VIARULE Via1_GEN_VV GENERATE
LAYER Metal1 ;
ENCLOSURE 0.000 0.060 ;
LAYER Metal2 ;
ENCLOSURE 0.010 0.060 ;
LAYER Via1 ;
RECT -0.130 -0.130 0.130 0.130 ;
SPACING 0.520 BY 0.520 ;
END Via1_GEN_VV
VIA Via1_4X4H_HH_DEFAULT DEFAULT
LAYER Via1 ;
RECT -1.060 -1.060 -0.800 -0.800 ;
RECT -0.440 -1.060 -0.180 -0.800 ;
RECT 0.180 -1.060 0.440 -0.800 ;
RECT 0.800 -1.060 1.060 -0.800 ;
RECT -1.060 -0.440 -0.800 -0.180 ;
RECT -0.440 -0.440 -0.180 -0.180 ;
RECT 0.180 -0.440 0.440 -0.180 ;
RECT 0.800 -0.440 1.060 -0.180 ;
RECT -1.060 0.180 -0.800 0.440 ;
RECT -0.440 0.180 -0.180 0.440 ;
RECT 0.180 0.180 0.440 0.440 ;
RECT 0.800 0.180 1.060 0.440 ;
RECT -1.060 0.800 -0.800 1.060 ;
RECT -0.440 0.800 -0.180 1.060 ;
RECT 0.180 0.800 0.440 1.060 ;
RECT 0.800 0.800 1.060 1.060 ;
LAYER Metal1 ;
RECT -1.120 -1.060 1.120 1.060 ;
LAYER Metal2 ;
RECT -1.120 -1.070 1.120 1.070 ;
END Via1_4X4H_HH_DEFAULT
VIA Via1_4X4H_HV_DEFAULT DEFAULT
LAYER Via1 ;
RECT -1.060 -1.060 -0.800 -0.800 ;
RECT -0.440 -1.060 -0.180 -0.800 ;
RECT 0.180 -1.060 0.440 -0.800 ;
RECT 0.800 -1.060 1.060 -0.800 ;
RECT -1.060 -0.440 -0.800 -0.180 ;
RECT -0.440 -0.440 -0.180 -0.180 ;
RECT 0.180 -0.440 0.440 -0.180 ;
RECT 0.800 -0.440 1.060 -0.180 ;
RECT -1.060 0.180 -0.800 0.440 ;
RECT -0.440 0.180 -0.180 0.440 ;
RECT 0.180 0.180 0.440 0.440 ;
RECT 0.800 0.180 1.060 0.440 ;
RECT -1.060 0.800 -0.800 1.060 ;
RECT -0.440 0.800 -0.180 1.060 ;
RECT 0.180 0.800 0.440 1.060 ;
RECT 0.800 0.800 1.060 1.060 ;
LAYER Metal1 ;
RECT -1.120 -1.060 1.120 1.060 ;
LAYER Metal2 ;
RECT -1.070 -1.120 1.070 1.120 ;
END Via1_4X4H_HV_DEFAULT
VIA Via1_4X4H_VH_DEFAULT DEFAULT
LAYER Via1 ;
RECT -1.060 -1.060 -0.800 -0.800 ;
RECT -0.440 -1.060 -0.180 -0.800 ;
RECT 0.180 -1.060 0.440 -0.800 ;
RECT 0.800 -1.060 1.060 -0.800 ;
RECT -1.060 -0.440 -0.800 -0.180 ;
RECT -0.440 -0.440 -0.180 -0.180 ;
RECT 0.180 -0.440 0.440 -0.180 ;
RECT 0.800 -0.440 1.060 -0.180 ;
RECT -1.060 0.180 -0.800 0.440 ;
RECT -0.440 0.180 -0.180 0.440 ;
RECT 0.180 0.180 0.440 0.440 ;
RECT 0.800 0.180 1.060 0.440 ;
RECT -1.060 0.800 -0.800 1.060 ;
RECT -0.440 0.800 -0.180 1.060 ;
RECT 0.180 0.800 0.440 1.060 ;
RECT 0.800 0.800 1.060 1.060 ;
LAYER Metal1 ;
RECT -1.060 -1.120 1.060 1.120 ;
LAYER Metal2 ;
RECT -1.120 -1.070 1.120 1.070 ;
END Via1_4X4H_VH_DEFAULT
VIA Via1_4X4H_VV_DEFAULT DEFAULT
LAYER Via1 ;
RECT -1.060 -1.060 -0.800 -0.800 ;
RECT -0.440 -1.060 -0.180 -0.800 ;
RECT 0.180 -1.060 0.440 -0.800 ;
RECT 0.800 -1.060 1.060 -0.800 ;
RECT -1.060 -0.440 -0.800 -0.180 ;
RECT -0.440 -0.440 -0.180 -0.180 ;
RECT 0.180 -0.440 0.440 -0.180 ;
RECT 0.800 -0.440 1.060 -0.180 ;
RECT -1.060 0.180 -0.800 0.440 ;
RECT -0.440 0.180 -0.180 0.440 ;
RECT 0.180 0.180 0.440 0.440 ;
RECT 0.800 0.180 1.060 0.440 ;
RECT -1.060 0.800 -0.800 1.060 ;
RECT -0.440 0.800 -0.180 1.060 ;
RECT 0.180 0.800 0.440 1.060 ;
RECT 0.800 0.800 1.060 1.060 ;
LAYER Metal1 ;
RECT -1.060 -1.120 1.060 1.120 ;
LAYER Metal2 ;
RECT -1.070 -1.120 1.070 1.120 ;
END Via1_4X4H_VV_DEFAULT
#------------------------------------------------------------
# Via2 VIA SECTION
#------------------------------------------------------------
VIARULE Via2_GEN_HH GENERATE
LAYER Metal2 ;
ENCLOSURE 0.060 0.010 ;
LAYER Metal3 ;
ENCLOSURE 0.250 0.120 ;
LAYER Via2 ;
RECT -0.130 -0.130 0.130 0.130 ;
SPACING 0.520 BY 0.520 ;
END Via2_GEN_HH
VIARULE Via2_GEN_HV GENERATE
LAYER Metal2 ;
ENCLOSURE 0.060 0.010 ;
LAYER Metal3 ;
ENCLOSURE 0.120 0.250 ;
LAYER Via2 ;
RECT -0.130 -0.130 0.130 0.130 ;
SPACING 0.520 BY 0.520 ;
END Via2_GEN_HV
VIARULE Via2_GEN_VH GENERATE
LAYER Metal2 ;
ENCLOSURE 0.010 0.060 ;
LAYER Metal3 ;
ENCLOSURE 0.250 0.120 ;
LAYER Via2 ;
RECT -0.130 -0.130 0.130 0.130 ;
SPACING 0.520 BY 0.520 ;
END Via2_GEN_VH
VIARULE Via2_GEN_VV GENERATE
LAYER Metal2 ;
ENCLOSURE 0.010 0.060 ;
LAYER Metal3 ;
ENCLOSURE 0.120 0.250 ;
LAYER Via2 ;
RECT -0.130 -0.130 0.130 0.130 ;
SPACING 0.520 BY 0.520 ;
END Via2_GEN_VV
VIARULE Via2_0 GENERATE
LAYER Metal2 ;
ENCLOSURE 0.010 0.060 ;
LAYER Metal3 ;
ENCLOSURE 0.120 0.120 ;
LAYER Via2 ;
RECT -0.130 -0.130 0.130 0.130 ;
SPACING 0.520 BY 0.520 ;
END Via2_0
VIA Via2_2X2_10_60_120_120_H_H DEFAULT
LAYER Via2 ;
RECT -0.390 -0.390 -0.130 -0.130 ;
RECT 0.130 -0.390 0.390 -0.130 ;
RECT -0.390 0.130 -0.130 0.390 ;
RECT 0.130 0.130 0.390 0.390 ;
LAYER Metal2 ;
RECT -0.450 -0.400 0.450 0.400 ;
LAYER Metal3 ;
RECT -0.510 -0.510 0.510 0.510 ;
END Via2_2X2_10_60_120_120_H_H
VIA Via2_2X2_10_60_120_120_V_H DEFAULT
LAYER Via2 ;
RECT -0.390 -0.390 -0.130 -0.130 ;
RECT 0.130 -0.390 0.390 -0.130 ;
RECT -0.390 0.130 -0.130 0.390 ;
RECT 0.130 0.130 0.390 0.390 ;
LAYER Metal2 ;
RECT -0.400 -0.450 0.400 0.450 ;
LAYER Metal3 ;
RECT -0.510 -0.510 0.510 0.510 ;
END Via2_2X2_10_60_120_120_V_H
VIA Via2_2X2_10_60_120_250_H_H DEFAULT
LAYER Via2 ;
RECT -0.390 -0.390 -0.130 -0.130 ;
RECT 0.130 -0.390 0.390 -0.130 ;
RECT -0.390 0.130 -0.130 0.390 ;
RECT 0.130 0.130 0.390 0.390 ;
LAYER Metal2 ;
RECT -0.450 -0.400 0.450 0.400 ;
LAYER Metal3 ;
RECT -0.640 -0.510 0.640 0.510 ;
END Via2_2X2_10_60_120_250_H_H
VIA Via2_2X2_10_60_120_250_H_V DEFAULT
LAYER Via2 ;
RECT -0.390 -0.390 -0.130 -0.130 ;
RECT 0.130 -0.390 0.390 -0.130 ;
RECT -0.390 0.130 -0.130 0.390 ;
RECT 0.130 0.130 0.390 0.390 ;
LAYER Metal2 ;
RECT -0.450 -0.400 0.450 0.400 ;
LAYER Metal3 ;
RECT -0.510 -0.640 0.510 0.640 ;
END Via2_2X2_10_60_120_250_H_V
VIA Via2_2X2_10_60_120_250_V_H DEFAULT
LAYER Via2 ;
RECT -0.390 -0.390 -0.130 -0.130 ;
RECT 0.130 -0.390 0.390 -0.130 ;
RECT -0.390 0.130 -0.130 0.390 ;
RECT 0.130 0.130 0.390 0.390 ;
LAYER Metal2 ;
RECT -0.400 -0.450 0.400 0.450 ;
LAYER Metal3 ;
RECT -0.640 -0.510 0.640 0.510 ;
END Via2_2X2_10_60_120_250_V_H
VIA Via2_2X2_10_60_120_250_V_V DEFAULT
LAYER Via2 ;
RECT -0.390 -0.390 -0.130 -0.130 ;
RECT 0.130 -0.390 0.390 -0.130 ;
RECT -0.390 0.130 -0.130 0.390 ;
RECT 0.130 0.130 0.390 0.390 ;
LAYER Metal2 ;
RECT -0.400 -0.450 0.400 0.450 ;
LAYER Metal3 ;
RECT -0.510 -0.640 0.510 0.640 ;
END Via2_2X2_10_60_120_250_V_V
VIA Via2_2X3_10_60_120_120_H_H DEFAULT
LAYER Via2 ;
RECT -0.390 -0.650 -0.130 -0.390 ;
RECT 0.130 -0.650 0.390 -0.390 ;
RECT -0.390 -0.130 -0.130 0.130 ;
RECT 0.130 -0.130 0.390 0.130 ;
RECT -0.390 0.390 -0.130 0.650 ;
RECT 0.130 0.390 0.390 0.650 ;
LAYER Metal2 ;
RECT -0.450 -0.660 0.450 0.660 ;
LAYER Metal3 ;
RECT -0.510 -0.770 0.510 0.770 ;
END Via2_2X3_10_60_120_120_H_H
VIA Via2_2X3_10_60_120_120_V_H DEFAULT
LAYER Via2 ;
RECT -0.390 -0.650 -0.130 -0.390 ;
RECT 0.130 -0.650 0.390 -0.390 ;
RECT -0.390 -0.130 -0.130 0.130 ;
RECT 0.130 -0.130 0.390 0.130 ;
RECT -0.390 0.390 -0.130 0.650 ;
RECT 0.130 0.390 0.390 0.650 ;
LAYER Metal2 ;
RECT -0.400 -0.710 0.400 0.710 ;
LAYER Metal3 ;
RECT -0.510 -0.770 0.510 0.770 ;
END Via2_2X3_10_60_120_120_V_H
VIA Via2_3X3_10_60_120_120_H_H DEFAULT
LAYER Via2 ;
RECT -0.650 -0.650 -0.390 -0.390 ;
RECT -0.130 -0.650 0.130 -0.390 ;
RECT 0.390 -0.650 0.650 -0.390 ;
RECT -0.650 -0.130 -0.390 0.130 ;
RECT -0.130 -0.130 0.130 0.130 ;
RECT 0.390 -0.130 0.650 0.130 ;
RECT -0.650 0.390 -0.390 0.650 ;
RECT -0.130 0.390 0.130 0.650 ;
RECT 0.390 0.390 0.650 0.650 ;
LAYER Metal2 ;
RECT -0.710 -0.660 0.710 0.660 ;
LAYER Metal3 ;
RECT -0.770 -0.770 0.770 0.770 ;
END Via2_3X3_10_60_120_120_H_H
VIA Via2_3X3_10_60_120_120_V_H DEFAULT
LAYER Via2 ;
RECT -0.650 -0.650 -0.390 -0.390 ;
RECT -0.130 -0.650 0.130 -0.390 ;
RECT 0.390 -0.650 0.650 -0.390 ;
RECT -0.650 -0.130 -0.390 0.130 ;
RECT -0.130 -0.130 0.130 0.130 ;
RECT 0.390 -0.130 0.650 0.130 ;
RECT -0.650 0.390 -0.390 0.650 ;
RECT -0.130 0.390 0.130 0.650 ;
RECT 0.390 0.390 0.650 0.650 ;
LAYER Metal2 ;
RECT -0.660 -0.710 0.660 0.710 ;
LAYER Metal3 ;
RECT -0.770 -0.770 0.770 0.770 ;
END Via2_3X3_10_60_120_120_V_H
VIA Via2_3X3_10_60_120_250_H_H DEFAULT
LAYER Via2 ;
RECT -0.650 -0.650 -0.390 -0.390 ;
RECT -0.130 -0.650 0.130 -0.390 ;
RECT 0.390 -0.650 0.650 -0.390 ;
RECT -0.650 -0.130 -0.390 0.130 ;
RECT -0.130 -0.130 0.130 0.130 ;
RECT 0.390 -0.130 0.650 0.130 ;
RECT -0.650 0.390 -0.390 0.650 ;
RECT -0.130 0.390 0.130 0.650 ;
RECT 0.390 0.390 0.650 0.650 ;
LAYER Metal2 ;
RECT -0.710 -0.660 0.710 0.660 ;
LAYER Metal3 ;
RECT -0.900 -0.770 0.900 0.770 ;
END Via2_3X3_10_60_120_250_H_H
VIA Via2_3X3_10_60_120_250_H_V DEFAULT
LAYER Via2 ;
RECT -0.650 -0.650 -0.390 -0.390 ;
RECT -0.130 -0.650 0.130 -0.390 ;
RECT 0.390 -0.650 0.650 -0.390 ;
RECT -0.650 -0.130 -0.390 0.130 ;
RECT -0.130 -0.130 0.130 0.130 ;
RECT 0.390 -0.130 0.650 0.130 ;
RECT -0.650 0.390 -0.390 0.650 ;
RECT -0.130 0.390 0.130 0.650 ;
RECT 0.390 0.390 0.650 0.650 ;
LAYER Metal2 ;
RECT -0.710 -0.660 0.710 0.660 ;
LAYER Metal3 ;
RECT -0.770 -0.900 0.770 0.900 ;
END Via2_3X3_10_60_120_250_H_V
VIA Via2_3X3_10_60_120_250_V_H DEFAULT
LAYER Via2 ;
RECT -0.650 -0.650 -0.390 -0.390 ;
RECT -0.130 -0.650 0.130 -0.390 ;
RECT 0.390 -0.650 0.650 -0.390 ;
RECT -0.650 -0.130 -0.390 0.130 ;
RECT -0.130 -0.130 0.130 0.130 ;
RECT 0.390 -0.130 0.650 0.130 ;
RECT -0.650 0.390 -0.390 0.650 ;
RECT -0.130 0.390 0.130 0.650 ;
RECT 0.390 0.390 0.650 0.650 ;
LAYER Metal2 ;
RECT -0.660 -0.710 0.660 0.710 ;
LAYER Metal3 ;
RECT -0.900 -0.770 0.900 0.770 ;
END Via2_3X3_10_60_120_250_V_H
VIA Via2_3X3_10_60_120_250_V_V DEFAULT
LAYER Via2 ;
RECT -0.650 -0.650 -0.390 -0.390 ;
RECT -0.130 -0.650 0.130 -0.390 ;
RECT 0.390 -0.650 0.650 -0.390 ;
RECT -0.650 -0.130 -0.390 0.130 ;
RECT -0.130 -0.130 0.130 0.130 ;
RECT 0.390 -0.130 0.650 0.130 ;
RECT -0.650 0.390 -0.390 0.650 ;
RECT -0.130 0.390 0.130 0.650 ;
RECT 0.390 0.390 0.650 0.650 ;
LAYER Metal2 ;
RECT -0.660 -0.710 0.660 0.710 ;
LAYER Metal3 ;
RECT -0.770 -0.900 0.770 0.900 ;
END Via2_3X3_10_60_120_250_V_V
VIA Via2_4X4H_HH_DEFAULT DEFAULT
LAYER Via2 ;
RECT -1.060 -1.060 -0.800 -0.800 ;
RECT -0.440 -1.060 -0.180 -0.800 ;
RECT 0.180 -1.060 0.440 -0.800 ;
RECT 0.800 -1.060 1.060 -0.800 ;
RECT -1.060 -0.440 -0.800 -0.180 ;
RECT -0.440 -0.440 -0.180 -0.180 ;
RECT 0.180 -0.440 0.440 -0.180 ;
RECT 0.800 -0.440 1.060 -0.180 ;
RECT -1.060 0.180 -0.800 0.440 ;
RECT -0.440 0.180 -0.180 0.440 ;
RECT 0.180 0.180 0.440 0.440 ;
RECT 0.800 0.180 1.060 0.440 ;
RECT -1.060 0.800 -0.800 1.060 ;
RECT -0.440 0.800 -0.180 1.060 ;
RECT 0.180 0.800 0.440 1.060 ;
RECT 0.800 0.800 1.060 1.060 ;
LAYER Metal2 ;
RECT -1.120 -1.070 1.120 1.070 ;
LAYER Metal3 ;
RECT -1.180 -1.180 1.180 1.180 ;
END Via2_4X4H_HH_DEFAULT
VIA Via2_4X4H_VH_DEFAULT DEFAULT
LAYER Via2 ;
RECT -1.060 -1.060 -0.800 -0.800 ;
RECT -0.440 -1.060 -0.180 -0.800 ;
RECT 0.180 -1.060 0.440 -0.800 ;
RECT 0.800 -1.060 1.060 -0.800 ;
RECT -1.060 -0.440 -0.800 -0.180 ;
RECT -0.440 -0.440 -0.180 -0.180 ;
RECT 0.180 -0.440 0.440 -0.180 ;
RECT 0.800 -0.440 1.060 -0.180 ;
RECT -1.060 0.180 -0.800 0.440 ;
RECT -0.440 0.180 -0.180 0.440 ;
RECT 0.180 0.180 0.440 0.440 ;
RECT 0.800 0.180 1.060 0.440 ;
RECT -1.060 0.800 -0.800 1.060 ;
RECT -0.440 0.800 -0.180 1.060 ;
RECT 0.180 0.800 0.440 1.060 ;
RECT 0.800 0.800 1.060 1.060 ;
LAYER Metal2 ;
RECT -1.070 -1.120 1.070 1.120 ;
LAYER Metal3 ;
RECT -1.180 -1.180 1.180 1.180 ;
END Via2_4X4H_VH_DEFAULT
VIA Via2_4X4V_VH_DEFAULT1 DEFAULT
LAYER Via2 ;
RECT -1.060 -1.060 -0.800 -0.800 ;
RECT -0.440 -1.060 -0.180 -0.800 ;
RECT 0.180 -1.060 0.440 -0.800 ;
RECT 0.800 -1.060 1.060 -0.800 ;
RECT -1.060 -0.440 -0.800 -0.180 ;
RECT -0.440 -0.440 -0.180 -0.180 ;
RECT 0.180 -0.440 0.440 -0.180 ;
RECT 0.800 -0.440 1.060 -0.180 ;
RECT -1.060 0.180 -0.800 0.440 ;
RECT -0.440 0.180 -0.180 0.440 ;
RECT 0.180 0.180 0.440 0.440 ;
RECT 0.800 0.180 1.060 0.440 ;
RECT -1.060 0.800 -0.800 1.060 ;
RECT -0.440 0.800 -0.180 1.060 ;
RECT 0.180 0.800 0.440 1.060 ;
RECT 0.800 0.800 1.060 1.060 ;
LAYER Metal2 ;
RECT -1.070 -1.120 1.070 1.120 ;
LAYER Metal3 ;
RECT -1.310 -1.180 1.310 1.180 ;
END Via2_4X4V_VH_DEFAULT1
END LIBRARY