blob: a7ff28a461bc485ed3fdb5ee766e0a4cbbe24487 [file] [log] [blame]
3.19 1P5M (TM 6KA with MIM Option B) Structure
==============================================
MIM was placed in between Metal4 and Metal5 (TOP Metal); SIN=0.042um for 1.5fF, SIN=0.062um for 1.0fF
.. image:: images/2_cross_section_19.png
:width: 600
:align: center
:alt: 1P5M (TM 6KA with MIM Option B) Structure