| 3.10 1P5M (TM 6KA with MIM) Structure | |
| ===================================== | |
| MIM was placed in between Metal2 and Metal3; SIN=0.042um for 1.5fF, SIN=0.062um for 1.0fF | |
| .. image:: images/2_cross_section_10.png | |
| :width: 600 | |
| :align: center | |
| :alt: 1P5M (TM 6KA with MIM) Structure | |