#,PARAMETERS,XTORS,DIMENSIONS / COMMENTS,MIN,TYP,MAX,UNITS
2,Contact Resistance,,,,,,
,M1-Poly (salicided),,0.22 x0.22,--,5.9,15,Ω/cont
,M1-N+ (salicided),,0.22 x0.22,--,6.3,15,Ω/cont
,M1-P+ (salicided),,0.22 x0.22,--,5.2,15,Ω/cont
,Via 1,,0.26 x 0.26,--,4.5,15,Ω/via
,Via 2,,0.26 x 0.26,--,4.5,15,Ω/via
,Via 3,,0.26 x 0.26,--,4.5,15,Ω/via
,Via 4,,0.26 x 0.26,--,4.5,15,Ω/via
,Via 5 (Top Via),,0.26 x 0.26,--,4.5,15,Ω/via