,Poly2,Metal1,Metal2,Metal3,Metal4,Metal5,"MetalTop
(6K Å)","MetalTop.1
(9K Å)","MetalTop.2
(11K Å)","MetalTop.3
(30K Å)"
t(um),0.2um,0.54um,0.54um,0.54um,0.54um,0.54um,0.69um,0.99um,1.19um,3.035um