Layer,Stack,Rs(ohm/Squre)
M1,375IMPTi/300A 101TiN/4.5KAL 10.6KW/100F_Ti/500TiN,0.090+/-0.014
M2,375IMPTi/300A 101TiN/4.5KAL 10.6KW/100F_Ti/500TiN,0.090+/-0.014
M3,375IMPTi/300A 101TiN/4.5KAL 10.6KW/100F_Ti/500TiN,0.090+/-0.014
M4,375IMPTi/300A 101TiN/4.5KAL 10.6KW/100F_Ti/500TiN,0.090+/-0.014
M5,375IMPTi/300A 101TiN/4.5KAL 10.6KW/100F_Ti/500TiN,0.090+/-0.014
MIM Top Plate,TiN600AMIMAL2000ATiN350A,0.18+/-0.027
TM(6KA),375IMPTi/300A101TiN/6KAL 10.6KW/50FTI250TIN,0.060+/-0.012
TM(9KA),375IMPTi/300A101TiN/9KAL 10.6KW/50FTI250TIN,0.04+/-0.009
TM(11KA),375IMPTi/300A101TiN/11KAL/250TIN,0.04+/-0.009
TM(30KA),375IMPTi/300A101TiN/30KAL /250TIN,0.0083+/-0.004