3.21 1P6M (TM 6KA with MIM Option B) Structure
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MIM was placed in between Metal5 and Metal6 (TOP Metal); SIN=0.042um for 1.5fF, SIN=0.062um for 1.0fF

.. image:: images/2_cross_section_21.png
   :width: 600
   :align: center
   :alt:  1P6M (TM 6KA with MIM Option B) Structure