#,PARAMETERS,SLM_ID,DIMENSIONS / COMMENTS,MIN,TYP,MAX,UNITS
1,Rsheet (Sheet Resistance),SAB RES2,W = 10um (to monitor film Rs),1600,2000,2400,□/sq
2,Temp. Coeff. TCR1,\*Test Chip,"W > 3um,",-1300,-1650,-1900,ppm/K
3,"Voltage Coeff, VCR1",\*Test Chip,"W > 3um,",-100,-150,-200,ppm/V